Mirco-Vu – Sol
Specifications of Sol
| Model | Measurement Capacity | XY Accuracy | Z Accuracy | Scale Resolution | Stage Capacity | Machine Dimensions |
|---|---|---|---|---|---|---|
| Sol 161 | 160x160x160 mm | 2.8+L/150 | 2.8+L/100 | 1.0 µm | 10 kg | 545x705x775 mm |
| Sol 311 | 315x315x160 mm | 4.5+L/155 | 2.8+L/100 | 1.0 µm | 10 kg | 827x1043x824 mm |
| Sol 312 | 315x315x250 mm | 3.3+L/150 | 3.3+L/100 | 1.0 µm | 10 kg | 827x1043x1019mm |
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